Instruments for experimental construction of a model of errors of a MEMS accelerometer
Abstract
Instruments for experimental construction of a model of errors of a MEMS accelerometer
Incoming article date: 22.10.2020The problem of experimental determination of the parameters of the error model of MEMS accelerometers is considered. Possible sources of errors and their nature are shown. When developing a model of errors, the influence of non-orthogonality of the axes, temperature dependences of the conversion coefficient, and displacement of zeros were taken into account. A mathematical model of the MEMS accelerometer errors and an algorithm for the experimental determination of its parameters have been developed. Specific structural schemes of the stands are presented. Their hardware and software implementation is described. Specific features of temperature control in a small-sized heat chamber with a heater and a cooler based on a Peltier element are considered. An example of experimental estimation of the parameters of the error model for one axis of the MPU6050 accelerometer is shown. The developed tools make it possible to start a systematic study and objective comparison of the characteristics of MEMS accelerometers from different companies, as well as to obtain their working error models suitable for use in filtering algorithms in the construction of various systems of inertial navigation and angular stabilization of objects.
Keywords: microelectromechanical systems, MEMS, errors, models, methods, designs, accelerometer, microcircuit, modeling