Criteria equality modal frequencies sensitive elements micromechanical gyroscopes-accelerometers

Abstract

Criteria equality modal frequencies sensitive elements micromechanical gyroscopes-accelerometers

Lysenko I.E., Ejova O.A.

Incoming article date: 20.05.2014

Developed criteria for matching the oscillation frequencies of sensitive elements biaxial functionally integrated micromechanical gyroscopes-accelerometers LL-type. Review the results of modeling.

Keywords: microsystm technology, element base, model, modeling, gyroscope, accelerometer, sensor