A series of samples of nanocrystalline zinc oxide films was fabricated by reactive magnetron sputtering under different regimes, heating up to 200-250 ° C and subsequent annealing. The effect of relative humidity in the range of 25-80% on the resistance of zinc oxide films was investigated. The character of the dependence of fabrication regimes on film resistance at different relative humidities was detected. The optimum conditions of insensitive to relative humidity zinc oxide films formation was obtained.
Keywords: nanocrystalline films, zinc oxide, magnetron sputtering, electrical resistance, relative humidity