The experimental studies of technological modes of formation of the elements for hybrid microfluidic sensor systems using focused ion beams by nanotechnology complex UHV NANOFAB are performed. The parameters of the focused ion beam to enable the development of microfluidics components are determined. Methods of forming of microfluidics structures on silicon substrate are studied. Parameters of generated elements were studied by scanning electron microscopy and atomic force microscopy. Formed and studied filtration membranes containing holes from 105 to 150 nm in diameter. The results can be used in the formation of nanoscale structures and the development of manufacturing processes microfluidics components for hybrid systems and lab-on-chip.

Keywords: Nanotechnology, focused ion beams, microfluidics, hybrid systems, sensor, lab-on-chip